High pressure gas system

ABSTRACT

Among other things, a device for use in electrolyzing water is described. The device comprises an electrolysis unit that includes a chamber, an ion exchange structure in the chamber, a cathode, an anode, a high pressure chamber, and a reservoir. The chamber is separated by the ion exchange structure into a first compartment and a second compartment. The cathode is in the first compartment and the anode in the second compartment. The reservoir is disposed in the high pressure chamber for storing water to be supplied to the chamber of the electrolysis unit. In some implementations, the ion exchange structure is a proton exchange membrane.

BACKGROUND

This application relates to high pressure gas systems.

Hydrogen gas carries energy and can be used, e.g., in a fuel cell, tomake electricity. Hydrogen gas can be generated in various ways. Forexample, water can be electrolyzed into oxygen and hydrogen using aso-called Hofmann voltammeter. However, to effectively use the generatedhydrogen gas, particularly for off-line use, the generated hydrogen gasfrom the Hofmann voltammeter needs to be stored. Such off-line use,e.g., is for use at a time and/or location different from when/where thehydrogen was generated. Generally, to store the hydrogen gas it isdesired to store it at a high density. However, to store hydrogen gas ata high density requires compression of the gas to a high pressure, e.g.,up to several thousand pounds per square inch (psi). To achieve thedesired hydrogen density, multi-stage compression is used to provide thehigh pressure compression by using, e.g., a hydraulic ram, in anoil-free and clean manner.

SUMMARY

Described are high pressure electrolysis devices/systems that compresshydrogen gas. Hydrogen gas is compressed within the electrolysisdevice/system without the need for significant power for compression.Exemplary ranges of compression of hydrogen are typically up to about10,000 psi, e.g., in a range of about 1,800 psi to 2,400 psi. Otherranges are possible. In addition to compressing hydrogen, the device canalso compress oxygen. Having compressed the gas(es) the gas or gases areavailable for high pressure storage in tanks and the like.

Use of this electrolysis device/system obviates the need for anyexternal compressors saving energy that would otherwise go to compressthe hydrogen gas before the hydrogen gas is stored at the high pressure.Compression ranges are determined based on application of the system orother considerations such as safety. Tensile strengths of the variousmaterials used in forming the electrolysis device/system are selected inorder to enable the system to withstand the desired compression rangeswith a safety margin. Described herein are embodiments of high pressureelectrolysis systems for generating and storing hydrogen gas. The highpressure electrolysis systems include one or more stacks ofsilicon-based MEMS wafers with integrated controls, e.g., on the wafers.

According to an aspect, a device for electrolyzing water includes anelectrolysis unit, that includes a chamber and an ion exchange structurein the chamber, the ion exchange structure including an ion exchangemember that is configured to separate the chamber into a firstcompartment and a second compartment, a cathode disposed on a firstportion of the ion exchange member and that is located in the firstcompartment, and an anode disposed on a second, different portion of theion exchange member and that is located in the second compartment. Thedevice also includes a case at least partially enclosing a high pressurechamber that receives hydrogen gas that results from the electrolysis ofwater in the ion exchange structure and a reservoir in fluidcommunication with the chamber of the electrolysis unit, the reservoirdisposed in the high pressure chamber and the reservoir configured tostore water that is supplied to the chamber of the electrolysis unit.

The device may include one or more of the following features.

The ion exchange structure includes a proton exchange membrane. The caseis further configured to enclose the electrolysis unit and reservoir.The ion exchange structure is a first ion exchange structure. The devicefurther includes a plurality of ion exchange structures including thefirst ion exchange structure in the chamber. The device further includesa hydrogen release port in fluid communication with the firstcompartment. The device further includes an oxygen release port in fluidcommunication with the second compartment. The device further includes asecond high pressure chamber that receives oxygen gas that results fromthe electrolysis of water in the ion exchange structure, the second highpressure chamber in fluid communication with an external environment.The device further includes a release valve disposed in second highpressure chamber to control egress of oxygen from the second highpressure chamber to the external environment. The high pressure chamberis in fluid communication with an external environment and is in fluidisolation from the first compartment. The high pressure chamber is influid communication with an external environment and direct fluidcommunication with the first compartment.

According to an additional aspect, a device for use in electrolyzingwater includes an electrolysis unit, comprising a plurality ofsubstrates. A first substrate provides an electrolyzer, the firstsubstrate forming a chamber and a channel formed in the first substratefor delivering water to the chamber, at least one ion exchange structurein the first chamber, the ion exchange structure including an ionexchange member that is configured to separate the chamber into a firstcompartment and a second compartment the ion exchange member including aporous substrate, a cathode disposed on a first portion of the ionexchange member and that is located in the first compartment and ananode disposed on a second, different portion of the ion exchange memberand that is located in the second compartment. The device also includesa case at least partially enclosing a high pressure chamber thatreceives hydrogen gas that results from the electrolysis of water in theion exchange structure, the high pressure chamber in fluid communicationwith an external environment and a reservoir in fluid communication withthe chamber of the electrolysis unit, the reservoir disposed in the highpressure chamber and the reservoir configured to store water that issupplied to the chamber of the electrolysis unit.

The device may include one or more of the following features.

The reservoir is in the high pressure chamber and comprises a springloaded bladder. There is a second substrate bonded, e.g., anodically, tothe first substrate to create gas channels. The cathode and the anodecan be in the form of dendrites and the material of the substrate issilicon or a glass or a ceramic. The device includes a first set of viaconductors disposed in the first substrate in electrical contact withthe cathodes and a second set of via conductors disposed in the firstsubstrate in electrical contact with the anode. A first liquid-gasseparator and a second liquid-gas separator are supported by the secondsubstrate. The first liquid-gas separator is in fluid communication withthe first compartment, and the second liquid-gas separator is in fluidcommunication with the second compartment. Additional units eachincluding an ion exchange structure are formed as an integral part ofthe first silicon substrate, a cathode and an anode. The chamber, theion exchange structures of the units and the channel are formed byetching a single crystal silicon wafer. The ion exchange structures areporous. The units are electrically connected in serial, in parallel, orin a combination of serial and parallel.

According to an additional aspect, a device for use in electrolyzingwater includes a reservoir for storing water, a chamber containing anion exchange structure for electrolyzing the water, and a case (pressurevessel) housing the reservoir and the silicon substrate(s). The casecomprises a gas release port and a gas return port. The device alsoincludes a storage tank in fluid communication with the gas release portand the gas return port. The chamber and the ion exchange structure areformed integrally in a silicon substrate.

The device may include one or more of the following features.

An internal pressure in the chamber, the reservoir and the storage tankis about 2,000 psi to about 5,000 psi. The pressure inside and outsidethe reservoir and in the case are substantially the same. A spring isprovided between the case and the reservoir. A sensor is provided tosense the pressure in the chamber. The device includes one or moresensors to sense the differential pressure of the chamber compartments.The device includes a processor that receives signals from the sensors.The processor is configured to operate and control the device.

According to an additional aspect, a device for use in electrolyzingwater includes a first stack substrate that includes a first siliconsubstrate and a second silicon substrate. The first silicon substratecomprises at least two ion exchange structures formed as an integralpart of the first silicon substrate in a chamber formed in the firstsilicon substrate, and gas channels formed in the first siliconsubstrate. The second silicon substrate comprises gas channels. Thesecond silicon substrate has a first surface anodically bonded to thefirst silicon substrate. The gas channels in the second siliconsubstrate are in fluid communication with the gas channels of the firstsilicon substrate.

The device may also include one or more of the following features. Thedevice includes a second stack substrate being the same as the firststack substrate. The second stack substrate and the first stacksubstrate are anodically bonded together. The device includes a topstack substrate and a bottom stack substrate, the top stack substratebonded to the either the first or second stack with the top stacksubstrate bonded to the other one of the top and bottom stacksubstrates.

According to an additional aspect, a device for use in electrolyzingwater includes a stack that includes a first silicon substrate, a secondsilicon substrate, a third substrate, and a fourth substrate. The firstsilicon substrate comprises at least two ion exchange structures formedas an integral part of the first silicon substrate in a chamber formedin the first silicon substrate, and gas channels formed in the firstsilicon substrate. The second silicon substrate comprises gas channels.The second silicon substrate has a first surface anodically bonded tothe first silicon substrate. The gas channels in the second siliconsubstrate are in fluid communication with the gas channels of the firstsilicon substrate. The third silicon substrate comprises at least twoion exchange structures formed as an integral part of the third siliconsubstrate in a chamber formed in the third silicon substrate, and gaschannels formed in the third silicon substrate. The second siliconsubstrate further has a second surface anodically bonded to the thirdsilicon substrate. The fourth silicon substrate comprises gas channels.The fourth silicon substrate has a first surface anodically bonded tothe third silicon substrate. The gas channels in the fourth siliconsubstrate are in fluid communication with the gas channels of the thirdsilicon substrate.

The device may also include one or more of the following features.

The device includes a top stack substrate and a bottom stack substrate,the top stack substrate bonded to the either the first or second stackwith the top stack substrate bonded to the other one of the top andbottom stack substrates.

The details of one or more embodiments of the invention are set forth inthe accompanying drawings and the description below. Other features,objects, and advantages of the invention are apparent from thedescription and drawings, and from the claims.

DESCRIPTION OF DRAWINGS

FIGS. 1A and 1B are block diagrams of high pressure electrolysissystems.

FIGS. 2A and 2B are block diagrams showing electrolyzer units for highpressure electrolysis systems.

FIG. 3 is a block diagram showing an ion exchange structure.

FIG. 4A is a schematic cross-sectional view of an electrolysis stack.

FIG. 4B is a schematic cross-sectional view of parts of an electrolysisstack.

FIGS. 5A-5C are schematic bottom, cross-sectional, and top views of anelectrolyzer substrate.

FIGS. 6A-6B are schematic top and cross-sectional views of a gas channelsubstrate.

FIGS. 7A-7B are schematic top and cross-sectional views of a top capsubstrate.

FIGS. 8A-8B are schematic top and cross-sectional views of a bottom capsubstrate.

FIGS. 9A-9C are schematic cross-sectional views of the electrolysisstack in a pressure vessel case.

FIG. 10 is an electrical wiring diagram of units (shown in blocks) ofthe electrolysis system.

FIG. 11 is a block diagram of user interaction with an electrolysissystem.

FIG. 12 is a diagram showing different operational components of theelectrolysis system.

DETAILED DESCRIPTION

Referring to FIG. 1A, a high pressure electrolysis system 10 includes anelectrolyzer 12 that is connected to one or more storage tanks 14, 16 ofwhich one is connected via a gas conduit loop 18 between that storagetank 14 and the electrolyzer 12. The high pressure electrolysis system10 is isolated from an external environment using valves or otherdevices 20. During electrolysis, the electrolyzer 12 continuouslyelectrolyzes (separates) water into hydrogen (H₂) and oxygen (O₂). Asthe hydrogen and oxygen gases accumulate, the internal pressure of thehigh pressure electrolysis system 10 increases, reaching about 500 psito 10,000 psi, about 1,000 psi to 5,000 psi, or about 2,000 psi and/orup to about 5,000 psi. As an example, the system 10 can be configured tostore hydrogen gas at about 2000 psi described. For other pressures, thesystem 10 would be basically the same, with modifications being made tovalves, etc. configured for such other pressures, etc. as will becomeapparent in the discussion below. The hydrogen gas is stored in thestorage tank at a high internal pressure without the need for anexternal compressor device to compress the gas. The tank has its ownvalve (not shown). Elimination of the compressor device provides asystem that is more energy efficient by eliminating the need for asignificant amount of energy to drive the compressor to compress the gasto the elevated pressure.

The electrolyzer 12, the loop gas conduit 18, and the storage tank 14are connected (using 0-rings, valves, or other approaches) and made ofmaterials that can withstand the high internal pressures that will beencountered. In particular, as explained in detail further below, insome embodiments, the electrolyzer 12 includes one or more electrolysisstacks (not shown) formed of one or more silicon wafer substrates, e.g.,single crystal silicon, and disposed in a case 22 that can withstandhigh pressures (a high pressure vessel case 22 is discussed below inconjunction with FIGS. 9A-9C). Alternative materials include glasses,ceramics and other materials that have comparable strengths, areelectrically non-conductive, and that are or can be treated, to beporous. The high pressure vessel case 22 has a high strength to containthe gas at a high pressure within the case. Various materials can beused, provided the material has the necessary tensile strength, etc. forthe particular pressure.

Prior to electrolysis, the electrolyzer 12 receives and stores waterfrom an external water treatment/storage device 24. After theelectrolyzer receives the water, port(s) that deliver the water aresealed, e.g., via valves or other mechanisms (not shown). The waterstorage device 24 can receive water from, e.g., domestic water supplyand provides passive water treatment, including chemical or pHadjustment, or reduction of particulate materials, as needed. In someimplementations, water from domestic water supply is provided to thestorage device 24 and is conditioned. For example, the water firstundergoes particulate filtering to remove small particulates in thewater. The particulate filtering can include multiple steps and canremove particles having dimensions larger than 1 micron. The removal ofthe particles prevents clogging of micro channels in the electrolyzer 12of high pressure electrolysis system 10. The water can further bechemically filtered. This removes unwanted chemicals such as dissolvedminerals, e.g., salts, etc. Additionally, the pH of the filtered watercan be adjusted to a value for efficient electrolysis. In someimplementations, the water stored at the water storage device 24 andprovided to the electrolyzer 12 has a pressure of the domestic watersupply, e.g., 60 psi or other pressures for which the domestic watersupply is supplied.

The generated high pressure hydrogen and oxygen gases are delivered fromthe electrolyzer 12 through separate conduits such as conduit 29 a forthe hydrogen and conduit 29 b for oxygen to one or more storage tanks14, 16 for each of the hydrogen and oxygen, respectively. The storagetanks 14, 16 are standard, commercially available, high pressure gascylinders. For applications where the production of hydrogen is for afuel cell, often the oxygen will not be stored, but will be vented, asdiscussed below. The hydrogen gas from the storage tank 14 can besupplied to a hydrogen gas consuming device, such as a fuel cell. Thegas conduit loop 18 between the storage tank 14 and electrolyzer 12receives hydrogen from the hydrogen release port 28 to simultaneouslyfill the storage tank and direct hydrogen back into the pressure vesselcase 22 through a hydrogen return port 30. The conduit loop 18 balancesthe high internal pressure of the electrolysis stacks and the pressureexternal to the electrolysis stacks within the vessel case 22 (discussedfurther below). In addition, a pressure regulator 30 is used to reducethe high pressure of the storage tank 14 for delivery to the fuel cell,via output port 32.

The system 10 shown in FIG. 1A can be located at the same location asthe hydrogen gas consuming device. In some implementations, theisolation valve 20 is used to isolate the electrolysis stack(electrolyzer 12) from the H₂ storage tank 14. An example of theisolation valve is a pressure-rated, electrically-controlled solenoidvalve. When a sufficient amount of hydrogen gas is generated and storedin the storage tank 14, the storage tank 14 can be separated from theelectrolyzer 12. The storage tank 14 can then be moved to any desiredlocation to supply the hydrogen gas to gas consuming devices (notshown). The high pressure electrolyzing system 10 can be powered byelectrical energy from a grid or from other sources, e.g., solar orwind. The generated H₂ gas represents stored energy that can be used ata later time.

Referring to FIG. 2A one example of an electrolyzer 12 connected to theconduit loop 18 is shown. The electrolyzer 12 includes a water inputchannel 39 controlled by a water fill valve 40. When a valve 40 is open,water, e.g., domestic water at a pressure of about 60 psi, fills anelectrolyzer chamber 42 and a reservoir 44. The electrolyzer chamber 42can be purged of extraneous gas during a water fill operation via the O₂conduit 53 a and release valve 53. The reservoir 44 stores a desiredquantity of water. In addition to capacity considerations the quantityof water depends on the amount of hydrogen that is desired to beproduced, e.g., about 1 liter to about 12 liters. An additional amountof water is introduced into the electolyzer 12 to fill the chamber andconduits therein. Other ranges are possible depending on specificrequirements and the specific configuration of the system 10. After thereservoir 44 is fully filled, the water fill valve 40 is closed. Theelectrolyzer 12 includes an ion exchange structure 45 including, e.g., aproton exchange membrane 46 (PEM) in the electrolyzer chamber 42. Themembrane 46 provides two connected compartments 48 a, 48 b in thechamber. The compartments are connected at the bottom of the membrane 46that is configured to have a length that is shorter than the height ofthe chamber 42.

Although only one ion exchange structure 45 is shown, the electrolyzer12 can include plural ion exchange structures 45 along all directions,e.g., x, y, z directions. Details of such embodiments are discussedfurther below. For convenience of discussion, an electrolyzer unit 43 ofthe electrolyzer 12 has one chamber that is separated into two adjacentcompartments 48 a, 48 b by the PEM membrane 46 on the ion exchangestructure 45. Multiple electrolyzer units 43 of the same electrolyzer 12can share the same reservoir 44, water fill valve 40, water inputchannel 39, or use different reservoirs, valves, or channels, asrequired by specifics of an application.

In the example shown in FIG. 2A, water is filled into the chambers 42and reservoir(s) 44 of a electrolyzer unit 43. Multiple suchelectrolyzer unit 43 are filled through water fill holes 50 betweenunits, i.e., stacks (one stack shown). The electrolyzer unit 43 can beformed in one substrate, e.g., silicon wafer, or in multiple stackedsubstrates, as will be detailed below. In some implementations, unitswithin one substrate do not have separation walls to separate adjacentunits (see, e.g., FIG. 4) (i.e., the units have shared chambers).

The ion exchange structure 45 is made of a porous material, such asporous silicon, to allow ions, e.g., protons, to pass across thestructure. The ion exchange structure 45 is gas impermeable so thatneither hydrogen gas nor oxygen gas can pass across the membrane 46. Insome implementations, the pores in the ion exchange structure are small,e.g., micropores or nanopores to prevent gas bubbles from passingthrough the ion exchange structure. The ion exchange structure has waterpaths indicated by arrows (not numbered) in pores of the ion exchangestructure 45 to allow ions to pass across the structure. The ionexchange structure 45 is sufficiently thin to reduce the ionicresistance in the path and is sufficiently thick to prevent excessivegas diffusion across the structure. Significant gas diffusion across thestructure corresponds to a loss in electrolysis efficiency, and thussuch diffusion should be minimized.

On both lateral sides of the ion exchange structure 45, metal, e.g.,platinum or gold, layers are formed. A metal layer 45 a, on one side isconnected to a negative lead 52 to act as a cathode, and the other metallayer 45 b is formed and connected to a positive lead 54 to act as ananode. Each compartment 48 a, 48 b of the unit 12 is associated with oneof those electrodes. When a voltage difference is applied between thetwo metal layers 45 a, 45 b, water is electrolyzed at the surfaces ofthe metal coatings to produce hydrogen at the cathode in one compartment48 a and oxygen at the anode in the other compartment 48 b.

To enhance electrolysis, the metal coatings can be in a “dendritic form”to provide large surface areas for contacting water. In addition, themetals may also be one or more catalysts to facilitate the electrolysisand to provide an electrical path for the electrons in the reaction. Insome implementations, the catalyst may be supported in/on the electrodeor the electrode can be made of the catalyst material which isconfigured to support a substantial current density without blocking theion migration through the ion exchange structure.

The produced hydrogen and oxygen remain separated in their respectivecompartments of the electrolyzer chamber 42, and are directed throughdifferent gas channels to different gas chambers 60, 61 and or tanks forstorage or use. Liquid-gas separators 56 a, 56 b, e.g., separationmembranes, are placed between each channel and the electrolyzercompartments 48 a, 48 b. Such separators are permeable gas andimpermeable to water so that the gases, i.e., hydrogen and oxygen,penetrate the separator into the respective conduits 58 a, 58 b, whilewater is stopped by the separators from entering the conduits 58 a, 58b. Several types of liquid gas separators can be used. For exampleporous silicon can be used with controlled size treated to behydrophobic.

Alternatively, can insert a piece of plastic polymer, such as Teflontreated by plasma or etching to produce small size holes. In someimplementations, the liquid-gas separators have hydrophobic surfaces.The oxygen gas can be released without storage, e.g., when there is nointended use for oxygen. The gas production increases the pressurewithin the reservoir 44, the electrolyzer 12, and the storage tanks 14(see, FIG. 1A).

In some implementations, the internal pressure of the system can reachabout 2,000 psi to about 5,000 psi or higher, upon production of the gasthrough continuously electrolyzing water. The pressure inside andoutside of the reservoir is balanced. The produced hydrogen gas fills ahydrogen chamber 60 over the reservoir 44, through the conduit loop 18and the hydrogen return port 30 (FIG. 1A). The hydrogen chamber 60 isprovided between the vessel case 22 and the electrolyzer unit 43 andcontains the reservoir 44 and its housing 68 (see also, FIG. 9C). Thehydrogen chamber 60 is in fluid communication with the outer surface ofthe reservoir 44 through one or more ports 68 a in the reservoir housing68. In some implementations, the reservoir 44 is a collapsiblereservoir, e.g., a bladder 71 made of rubber material, so that as wateris consumed in the electrolyzer chamber 42 for electrolysis, thereservoir 44 collapses to follow the volume change of the water forcingmore water into the chamber 42. Similarly, an oxygen chamber 61 isprovided to receive oxygen that results from electrolysis. The oxygenchamber is also high pressure (e.g., same pressure as the hydrogenchamber). An O₂ release value is controlled to release pressureaccording to sensed pressure in the chamber. Thus, various pressuresensors (as indicated in FIG.2A by the item “S”) are shown disposed inthe various chambers such as chambers 60 and 61 to sense gas pressures,as well as the reservoir 44 to sense water pressure. Other sensors (tosense gas and/or water) can be included in various parts of the device10 such as in the compartments 48 a, 48 b, etc. These sensors feedsignals via conductors or the like (not shown) to a controller (FIG.11).

In the example shown in FIG. 2A, a spring 70 is placed between thereservoir housing 68 and the reservoir 44 to apply a compressive forceto the water to continually replenish water to the electrolysis chamber42 as the water is consumed. Units different from that shown in FIG. 2Acan also be used. For example, the reservoir 44 and the hydrogen chamber42 can be arranged differently, e.g., to accommodate reservoirs 44having different sizes for storing desired amounts of water forelectrolysis. The spring force is chosen according to the pressure atwhich water is introduced into the electrolyzer 12. In general, thepressure exerted by the water would need to overcome the force appliedto the reservoir 44 by the spring.

In some implementations, the parts of the systems shown in FIGS. 1A and2A can be alternatively configured.

Referring now to FIGS. 1B and 2B, an alternative arrangement is shown.This alternative system 10′ does not include the conduit loop 18 of FIG.1A for feeding the hydrogen gas back into the pressure vessel case inorder to balance the inside and outside pressures of a reservoir (as wasshown in FIGS. lA and 2A). The alternative system 10′ includes anelectrolysis unit within an electrolyzer 12′ that is similar inconstruction to electrolyzer 12 (FIG. 2A). In FIG. 2B, the compartment48 a is coupled through the liquid/gas separator 58 a to the highpressure hydrogen chamber 60 by a conduit. Thus, hydrogen fromelectrolysis fills the H₂ chamber 60 directly, as shown.

In FIGS. 1A, 1B, 2A and 2B, balancing of the pressure inside and outsidethe reservoir is achieved by controlled venting of oxygen gas from theO₂ release valve 53. The pressure in the O₂ chamber is balanced to theH₂ chamber 60 in this manner. The hydrogen gas within the hydrogenstorage chamber 60 is further delivered through the hydrogen releaseport 28 to a hydrogen storage tank 16. Other items in FIGS. 1B and 2Bare as the respective descriptions for FIGS. 1A and 1B.

In particular, compared to the systems shown in FIGS. 1A and 2A, theconduit inside the vessel case 22 between the hydrogen exit port of theelectrolysis unit and the hydrogen release port on the pressure vesselcase is removed. In addition, a hydrogen purge port 80 is used to reducethe pressure inside the pressure vessel case 22 and the electrolyzerunit 43 during the storage state, e.g., for a long time, of the system10 when the isolation valve 20 is closed.

Referring now to FIG. 3, an example arrangement of the ion exchangestructure 45, cathode 45 a, and anode 45 b within an electrolysis unitof the electrolyzer 12 is shown. One or more catalysts, such asplatinum, are disposed on the porous ion exchange structure 45 tofacilitate the electrolysis and provide a path for the electrons.Furthermore, the ion exchange structure 45 can be coated with amaterial, e.g., by surface treatment of the silicon, to providehydrophilic surfaces 84 to attract water into the ion exchange structureand enhance the electrolysis process. The cathode and the anode 45 a, 45b can be in the form of dendrites, e.g., branched projections from themetal core on the ion exchange structure to increase surface area.

In some implementations, the cathode can be formed of “dendriticplatinum” and the anode can be formed of “dendritic”RuIr_(0.5)Ta_(0.5)O₂ alloy. Other suitable materials such as bothelectrodes being platinum as well as other materials can also be used.In some implementations, the PH of the water in the chamber is adjustedto be acidic to provide efficient electrolysis.

The hydrogen and oxygen compartments 48 a, 48 b are separated by the ionexchange structure 45 but not sealed by it, since there is a gap at thebottom of the ion exchange structure. This gap functions to equalize thepressure in both compartments thus substantially minimizing any lateralflow (crossover) of hydrogen or oxygen across and underneath the ionexchange structure. The gap also provides an additional path for ions.In use, a substantial amount of the produced hydrogen gas and oxygen gasseparately permeate the respective liquid-gas separators withoutsubstantial mixing of the two types of gas.

Referring to FIGS. 4A and 4B, an electrolysis unit 43 configured as anelectrolysis stack (for placing in a high strength pressure vessel caseto provide the electrolyzer 12) includes one or more (two shown) stacks90 each stack 90 including an electrolyzer substrate 92 bonded, e.g.,anodically bonded 91, to a gas channel substrate 94. Each electrolyzersubstrate 92 has multiple electrolyzer units 43 with multipleelectrolyzer chambers 48 a, 48 b. When multiple stack 90 are stackedalong the y direction, the surface of an electrolyzer substrate in onestack substrate bonds to a surface of a gas channel substrate in anadjacent stack substrate. The electrolysis stack also includes a top capsubstrate 96 and a bottom cap 98 substrate that caps the electrolysisstack(s) 90 on opposite ends. Each of the electrolyzer substrates, gaschannel substrates, top cap substrate, and bottom cap substrate can beformed in separate silicon wafers, e.g., single crystal silicon wafers.Different substrates are bonded using anodic bonding (or direct siliconbonding). The materials, structures, and bonding of the electrolysisstack can withstand a high internal pressure, e.g., in the electrolyzerchamber or elsewhere, up to about 10,000 psi.

In the example shown in FIGS. 4A and 4B, each electrolyzer substrate 92is bonded to a gas channel substrate 94 to form a single stack substrate97. One or more of these stack substrates 97 can be stacked together toincrease electrolysis capacity and then capped with a top 96 capsubstrate and a bottom cap substrate 98. Additional stack substrates 92can be included between the top cap 96 and bottom cap substrates 98 (ydirection). Other substrates can be stacked along a directionperpendicular to the paper (z direction) and/or along the x direction.Each stack substrate 97 includes electrolyzer chambers 42 each havingconnected compartments 48 a, 48 b separated by an ion exchangestructure.

Water can be filled through aligned water channels 101 having an openingin the top cap substrate to all compartments of the chambers in allstacked electrolyzer substrates. The hydrogen gas and oxygen gas flowfrom the chambers through designated gas channels 103 in the gas channelsubstrates 94 (details discussed below).

Referring to now FIGS. 5A-5C, the electrolyzer chamber 42 and chambercompartments 48 a, 48 b of the electrolyzer substrate 92 of FIGS. 4A and4B are formed by etching a single crystal silicon wafer (not shown). Aswould be understood, plural of such electrolyzer chambers 42 can befabricated as die from a silicon wafer. The walls defining the waterchannels, gas channels, or other channels/compartments, and the ionexchange structures are masked while the other parts of the wafer areremoved by etching. In some implementations, additional membrane wallsupports are formed along the membranes (FIG. 5C). The ion exchangestructures can be further etched to become porous, e.g., usingconventional etching techniques. In some implementations, the ionexchange structures are treated to be hydrophilic. In addition, theliquid-gas separators are formed as hydrophobic porous silicon by, e.g.,etching.

Metal layers, i.e., anodes and cathodes, can be formed as connecteddendrites along the ion exchange structure using deposition or platingtechniques. At the base of the ion exchange structures, vias areembedded in the electrolyzer substrate to convey electrons from theelectrodes of the ion exchange structure to electrical busses that areused to wire the electrolyzing system. The vias are made usingsemiconductor fabrication processes and have a very low electricalresistance. The vias are distributed along a surface of the ion exchangestructure substantially evenly.

In the example shown in FIG. 5A, conductive vias 110 (and therefore,electrodes) of different ion exchange structures are serially connectedusing electrical connections 112 formed of a conductive, e.g., metal,material. In such an arrangement, the total voltage applied to theelectrolyzer can be substantially evenly divided to each unit(containing one ion exchange structure, an anode, and a cathode). Thetotal voltage can be chosen based on the desired unit voltage. In someimplementations, each unit voltage is about 1.4 V-1.7 V. The units canalso be electrically connected in parallel. In other implementations, anumber of the electrolyzing units can be electrically connected seriallyand multiple groups of the serially connected electrolyzing units can beconnected in parallel. Examples of configurations are shown in FIG. 10.

In use, as explained previously, hydrogen gas and oxygen gas are formedon the cathode and anode sides of the ion exchange structures,respectively. The produced gas flows along a direction indicated by thearrows shown in FIG. 5B. In particular, the gas flows upwards along theion exchange structures into openings 114 formed in the substrate. Theopenings 114 are sealed by the gas channel substrate (see, e.g., FIG. 4and FIG. 6B below), forcing the gas to pass through the liquid-gasseparators to exit the substrate into the gas channel substrate. The H₂channels 116 and O₂ channels 118 (FIG. 5C) are vertical channels thatrun through the stack of substrates from top to bottom and connect toevery electrolyzer substrate in the stack.

Referring to FIGS. 6A and 6B, the gas channel substrate 94 is alsoformed in a single crystal silicon wafer and is bonded to theelectrolyzer substrate (FIGS. 5A-5C) using anodic bonding. The gaschannel substrate 94 includes hydrogen and oxygen gas channels 120, 122that, when bonded to the electrolyzer substrate 92, are in fluidcommunication with the liquid-gas separators in the electrolyzersubstrate 92 to receive the produced gas from the electrolyzer substrate92.

As shown in FIG. 6A, on the top surface of the gas channel substrate 94,extended hydrogen and oxygen channels in communication with the hydrogenand oxygen channels are formed. Gas (hydrogen and oxygen) delivered fromthe liquid-gas separator reaches the respective gas extended channels(hydrogen gas channels and oxygen gas channels) in the gas channelsubstrate and spreads into the (vertical) gas channels. The extendedhydrogen and oxygen channels increase the cross-sectional areas of thegas delivery channels and can facilitate gas delivery between theelectrolyzing system and the storage tank.

The gas channel substrate also includes electrically conductive vias 128that, when bonded to the electrolyzer substrate, are in electricalcontact with the vias 110 in the electrolyzer substrate. One or moreanode busses 132 or cathode busses 134 are formed on the gas channelsubstrate, e.g., of a metal, to provide the electrolyzer withconnections to external electrical sources. In addition, the gas channelsubstrate includes water channels 136 that, when bonded to theelectrolyzer substrate, are in fluid communication with the waterchannels 101 in the electrolyzer substrate. Water is filled through thewater channels in the gas channel substrate to the water channels of theelectrolyzer substrate. Openings 129 are shown that mate with openings119 in the substrate 92.

Referring to FIGS. 7A-7B, the top cap substrate 96 is attached to thegas channel substrate (not shown) of the top most stack substrate (notshown). The top cap substrate 96 supports a reservoir housing 142enclosing reservoir 144 provided by, e.g., a silicon rubber bladder. Thehousing 142 can be provided by forming a metallic layer on an outsidepart of the top cap substrate and soldering a metal member onto the topcap substrate. Alternatively, the housing could be mounted to the highpressure vessel case, in the hydrogen storage chamber. The reservoirhousing 142 includes one or more ports 146 that keep pressure inside thehousing 142 and the pressure outside the housing 142 the same.

One or more springs 148 (three shown) are placed between the reservoir144 and the reservoir housing 142 to compress the water reservoir andforce water out of the bladder as it is being consumed in theelectrolyzer chamber 42 during electrolysis. The spring force isselected such that water can be filled into the reservoir from, e.g., adomestic water source. For example, when the water source is domesticwater supply, the spring force is chosen so that the pressure at whichwater is filled into the reservoir (e.g., domestic water pressure at 60psi) can overcome the spring force to allow the reservoir to be filledwith water through one or more water channels 152 in the top capsubstrate 96. During electrolysis, the water in the reservoir isdelivered into the electrolyzer chamber through the water channels inthe top cap substrate.

In addition, the top cap substrate also includes hydrogen channels 154that, when bonded to the top most gas channel substrate, are in fluidcommunication with the hydrogen channels and hydrogen extended channelsin the gas channel substrate (FIG. 6A). Hydrogen flows from the hydrogenchannels 154 of the top cap substrate 96 at a hydrogen exit port 156 tothe hydrogen release port 32 in the high pressure vessel case (see,e.g., FIG. 1A). The hydrogen release port delivers generated hydrogenfor storage and other uses.

Referring to FIGS. 8A-8B, the bottom cap substrate 98 is attached, e.g.,bonded, to the bottom most electrolyzer substrate 92 of the electrolyzerunit 43, i.e., on the opposite surface of electrolyzer 92 to which thetop cap substrate 96 is bonded. When the substrates 92 and 98 arebonded, oxygen channels 160 in the bottom cap substrate 98 are incommunication with the oxygen channels in the electrolyzer substrate 92.When an electrolyzer unit 43 is disposed in the high pressure vessel(discussed later), oxygen gas from the electrolyzer substrate 92 flowsthrough the bottom cap substrate 98, as shown by the arrows in FIG. 8B.A MEMS (micro-electro-mechanical) valve 164 regulates the release of theoxygen from the space between the vessel case and the electrolysis stack(O₂ chamber), through the oxygen exit port to the external environment.The valve 164 is closed or opened to adjust the oxygen pressure withinthe electrolyzer unit so that the oxygen pressure is balanced with thehydrogen pressure to maintain proper functioning and protection of theliquid-gas separators.

As previously discussed (e.g., with FIGS. 2A and 3), the differencebetween hydrogen pressure and oxygen pressure across the ion exchangestructure is maintained to be substantially zero. For example, as thehydrogen pressure increases (e.g., because of generation) or decreases(e.g., because of consumption), the pressure of the oxygen is regulatedby venting the oxygen using the MEMS valve 164 in a controlled manner.

Referring to FIGS. 9A-9C, the electrolyzer unit comprised of the partsdescribed in FIGS. 4A-4B, 5A-5C, 6A-6B, 7A-7B, and 8A-8B is sealed in apressure vessel case 22. The cross section of the pressure vessel case22 can be in any shape, e.g., rectangular, oval, cylindrical, orcircular. A rectangular shaped case is shown. However, circular shapesmay be preferred because they tend to be able to withstand highpressures better than oval, which tends to be better than rectangular.The vessel case can include multiple pieces, e.g., a top case portion172 and a bottom case portion 174 that are bolted together. The vesselcase portions 172 and 174 are sealed together to isolate producedhydrogen and oxygen gas from the external environment. Sealing isprovided by, e.g., one or more O-rings 176 or interference fit metalsurfaces or other techniques. The vessel case 22 can be metallic and,together with the O-rings 176 is configured to withstand high internalpressures, e.g., about 2,000 psi to about 5,000 psi or about 2,200 psi.In some implementations, the vessel case 22 and the O-rings 176 canwithstand twice the operating pressure of the electrolysis system 10 forsafety. In addition, electrical connections 171, e.g., leads connectingthe electrical busses of the gas channel substrate (see, e.g., FIG. 6A)and external electrical sources, passes through the vessel case.

Referring in particular to FIG. 9C pressure vessel includes a hydrogenrelease port 180 connected to the hydrogen exit port 156 in the top capsubstrate 96 for delivering hydrogen to the storage tank, and a hydrogenreturn port 182 that is in fluid communication with the hydrogen releaseport 180 and the reservoir 44 in the top cap substrate. In particular,the hydrogen return port 182 fills a hydrogen storage space between thevessel and the reservoir (H₂ chamber) with hydrogen having the samepressure, e.g., 2,200 psi, as the hydrogen within the electrolyzerchambers (not shown). The hydrogen in the hydrogen storage space entersinto the reservoir housing 142 through ports 199 in the housing 96 andbalances the pressures inside and outside the water reservoir 44. Otherconfigurations between the reservoir and the H₂ storage space can beused, e.g., to accommodate a desired size of the reservoir for storing adesired amount of water.

Between the pressure vessel bottom case portion 176 and the electrolyzerunit 43 there is also an oxygen storage space (O₂ chamber) that issealed from the hydrogen storage space using low pressure seals. Theoxygen pressure in the oxygen storage space can be controlled to besubstantially the same as the hydrogen pressure in the hydrogen storagespace.

The pressure vessel case 22 also includes water fill valve 40 and awater fill port 200 and also can include a water purge valve and port(not shown). When the water fill valve 40 is open, water is filledthrough the water fill port 200 into the water channels, the reservoir44 and the electrolyzer unit 43 at a pressure of about 60 psi.

Referring back to FIG. 9B, the vessel case 22 also has an oxygen releaseport 204 controlled by an oxygen release valve 206. Oxygen in the oxygenstorage space is directly released to an external environment. In someimplementations, the generated oxygen can also be stored in a mannersimilar to that of hydrogen for use, e.g., delivered to an oxygenstorage tank. Use of stored oxygen along with the hydrogen can increasethe efficiency of a fuel cell that consumes the gas to produceelectrical power. Other than the hydrogen return port, the other ports,i.e., the hydrogen release port, the oxygen release port, and the waterfill port are isolated from the spaces between the pressure vessel andthe electrolysis stack.

The electrolysis stack 12, as well as the pressure vessel case 22 can besized according to a rate that hydrogen is produced and a desiredmaximum operating pressure. The substrates of the electrolyzer units 43are provided in silicon wafers that are cut into dies having variousdimensions.

Referring to FIG. 10, in one example, 353 electrolyzing units (N) areserially connected as a group (G) and ten of such groups (G to G+9) areconnected in parallel. When a source current is 20 A, the source voltageis 600 V and the source power is 12 KW. Each electrolyzing unit (N) hasa voltage of about 1.7 V applied in order to carry out the electrolysisprocess. The units (N) can also be wired under dynamic control thatallows the system to reconfigure to varying electrical input power,e.g., from a renewable energy source, such as wind or solar or as thesystem's temperature changes.

Referring to FIG. 11, a user can interact with the electrolysis system10 through a user interface (not shown). Various types of userinterfaces can be used. For example a graphical user interface producedby a controller and rendered on a display can be used.

The electrolysis system 10 includes a controller as well as memory andinput/output ports. Suitable controllers can include a micro-controller,a processor or other type of computing device, and can include acomputer. The sensors (mentioned in FIG. 2A and included in allembodiments), such as hydrogen pressure sensor in the hydrogen storagespace, oxygen pressure sensor in the oxygen storage space, and waterpressure sensor in the water reservoir are disposed in the electrolyzingsystem 10 or 10″ to facilitate the automatic control of the system. Insome implementations, the sensors are powered by the same external powersource that provides power to the electrolyzer chamber. The controllerautomatically controls valves, e.g., the isolation valve, the water fillMEMS valve, the oxygen release MEMS valve, etc. for controlling therelease/delivery of the hydrogen and oxygen gas. The controllerautomatically controls the system 10 based on, e.g., the sensors'output.

The electrolysis system 10 can work on a daily basis repeatedly,although it can be operated on a longer time basis if desired. Forexample, the system operates for six hours during the off peak hours(late night/early morning) to electrolyze about eleven liters of water,place the generated hydrogen in a tank, and release the oxygen (althoughthe oxygen can also be put in a tank if desired). The hydrogen is storedat high pressure, e.g., about 2,000 psi to about 5,000 psi, without anycompressor between the electrolyzer and the storage tank. The storedhydrogen can be used in a PowerNode™ Encite, LLC (e.g., a hydrogen/airfuel cell) to provide electricity the following day during theelectricity peak load period.

Referring to FIG. 12, the electrolysis system 10 can be operated in thefollowing manner.

The electrolysis system 10 is filled with water. In an illustrativeexample, the electrolysis system 10 is filled with about eleven litersof treated water. The electrolysis system 10 electrolyzes the water toproduce hydrogen and oxygen. As the electrolysis system 10 electrolyzesthe water, the system stores the hydrogen (and oxygen if desired) andthe system once all of the water has been electrolyzed goes into adormant state and remains dormant until hydrogen starts being used.

The system maintains a pressure balance across the proton exchangemembranes during use. In addition, when power is not available to theelectrolysis system 10, the system enters an off state and waits untilpower is again available, e.g. during off peak periods (or sunlight orwind return) to begin the cycle again.

The controller is implemented in digital electronic circuitry or incomputer hardware, firmware, software, or in combinations thereof.Apparatus can include a computer program product tangibly embodied in acomputer-readable storage device for execution by a programmableprocessor. The controller can be implemented using suitable processorsthat include, by way of example, both general and special purposemicroprocessors. Generally, a processor will receive instructions anddata from a read-only memory and/or a random access memory. Storagedevices suitable for tangibly embodying computer program instructionsand data include all forms of memory, including by way of examplesemiconductor memory devices, such as EPROM, EEPROM, RAM and flashmemory devices. In addition, magnetic disks such as internal hard disksand removable disks; magneto-optical disks; and CDROM disks could beused. Any of the foregoing can be supplemented by, or incorporated in,ASICs (application-specific integrated circuits). In some implementationthe execution environment can include an operating system.

What is claimed is:
 1. A device for electrolyzing water, the device comprising: an electrolysis unit having a chamber, the electrolysis unit comprising: an ion exchange structure in the chamber, which separates the chamber into a first compartment and a second compartment; a cathode disposed on a first portion of the ion exchange structure, with the cathode located in the first compartment; and an anode disposed on a second, different portion of the ion exchange structure, with the anode located in the second compartment; a case enclosing a high pressure chamber that receives hydrogen gas that results from the electrolysis of water in the ion exchange structure; and a reservoir housing enclosing a collapsible reservoir, the reservoir housing disposed within the high pressure chamber, the reservoir housing having at least one channel that is in fluid communication with the chamber of the electrolysis unit and at least one port in fluid communication with the high pressure chamber, the collapsible reservoir configured to store water and to supply stored water to the chamber of the electrolysis unit.
 2. The device of claim 1 wherein the ion exchange structure includes a proton exchange membrane.
 3. The device of claim 1 wherein the case is a device case that encloses the electrolysis unit and the collapsible reservoir, and with the reservoir housing containing a bladder forming the collapsible reservoir and spring that applies pressure to the bladder.
 4. The device of claim 1 wherein the ion exchange structure is a first ion exchange structure, the device further comprising: a plurality of ion exchange structures including the first ion exchange structure in the chamber.
 5. The device of claim 1 further comprising: a hydrogen release port in fluid communication with the first compartment.
 6. The device of claim 1 further comprising: an oxygen release port in fluid communication with the second compartment.
 7. The device of claim 1 further comprising: a second high pressure chamber that receives oxygen gas that results from the electrolysis of water in the ion exchange structure.
 8. The device of claim 7 wherein the second high pressure chamber is in fluid communication with an external environment, and the device further comprises: a release valve disposed in the second high pressure chamber to control egress of oxygen from the second high pressure chamber to the external environment.
 9. The device of claim 1 wherein the high pressure chamber is in fluid communication with an external environment and is in fluid isolation from the second compartment.
 10. The device of claim 1 wherein the high pressure chamber is in fluid communication with an external environment and direct fluid communication with the first compartment.
 11. A device for use in electrolyzing water, the device comprising: an electrolysis unit, comprising: a substrate forming a chamber, with the substrate having a channel formed in the substrate for delivering water to the chamber; at least one ion exchange structure in the chamber, which separates the chamber into a first compartment and a second compartment, the ion exchange structure member including: a porous substrates; a proton exchange member on the porous substrate; a cathode disposed on the porous substrate and with the cathode in the first compartment; and an anode disposed on the porous substrate opposite to the cathode, and with the anode in the second compartment; a case enclosing a high pressure chamber that receives hydrogen gas that results from the electrolysis of water in the ion exchange structure, the high pressure chamber in fluid communication with an external environment; and a reservoir housing enclosing a collapsible reservoir, the reservoir housing disposed within the high pressure chamber, the reservoir housing having at least one channel that is in fluid communication with the chamber of the electrolysis unit, and at least one port in fluid communication with the high pressure chamber, and the collapsible reservoir configured to store water and to supply stored water to the chamber of the electrolysis unit.
 12. The device of claim 11 wherein the collapsible reservoir comprises: a bladder member; and a spring member that is urged against the bladder.
 13. The device of claim 11, wherein the substrate is a first substrate, the device further comprising: a second substrate anodically bonded to the first substrate and covering the chamber.
 14. The device of claim 11, wherein the cathode and the anode are in the form of dendritic metallic layers and the material of the substrate is silicon or a glass or a ceramic.
 15. The device of claim 11, further comprising: a first set of via conductors disposed in the substrate, which are in electrical contact with the cathode and a second set of via conductors disposed in the substrate, which are in electrical contact with the anode.
 16. The device of claim 13, wherein the first and second substrates are comprised of silicon, the device further comprising: a first liquid-gas separator supported by a portion of the second silicon substrate, the first liquid-gas separator being in fluid communication with the first compartment; and a second liquid-gas separator supported by the second silicon substrate, the second liquid-gas separator being in fluid communication with the second compartment.
 17. The device of claim 11, wherein the substrate is comprised of silicon and the electrolysis unit is first electrolysis unit, the device further comprising: a plurality of additional electrolysis units, each of the additional electrolysis units comprising: a corresponding silicon substrate forming a chamber, with the corresponding substrate having a channel formed in the corresponding substrate for delivering water to the chamber in the corresponding substrate; an ion exchange structure formed in the chamber of the corresponding substrate to separate the chamber into a first compartment and a second compartment, the ion exchange member including; a porous substrate; a proton exchange member on the porous substrate; a cathode disposed on the porous substrate and with the cathode in the first compartment; and an anode disposed on the porous substrate opposite to the cathode, and with the anode in the second compartment.
 18. The device of claim 17, wherein the substrates are comprised of single crystalline silicon material.
 19. The device of claim 11, further comprising one or more sensors to sense pressure in the high pressure chamber; and a processor that receives signals from the sensors and with the processor configured to operate and control the device.
 20. The device of claim 17, wherein the first electrolysis unit and the plurality of additional electrolysis units are electrically connected in serial, in parallel or in a combination of serial and parallel configurations.
 21. A device for use in electrolyzing water, the device comprising: a reservoir housing that encloses a collapsible reservoir for storing water; a chamber containing an ion exchange structure for electrolyzing the water, the chamber and the ion exchange structure formed integrally in a silicon substrate, with the collapsible reservoir having a passage through the reservoir housing to the chamber to provide the collapsible reservoir in fluid communication with the chamber; and a case housing member that provides a high pressure chamber, and which encloses the reservoir housing and the chamber formed integrally in the silicon substrate, the case housing member having a gas release port and a gas return port, with the reservoir housing having at least one port that fluidly couples the chamber formed integrally in the silicon substrate to the high pressure chamber.
 22. The device of claim 21, wherein an internal pressure in the chamber, the reservoir and the storage tank is about 2,000 psi to about 5,000 psi.
 23. The device of claim 21, wherein the pressure inside and outside the reservoir and in the case are substantially the same.
 24. The device of claim 21, further comprising: a collapsible bladder that forms the collapsible reservoir; and a spring disposed between the collapsible bladder and the reservoir housing.
 25. The device of claim 21 further comprising one or more sensors to sense pressure in the high pressure chamber.
 26. The device of claim 25, further comprising a processor that receives signals from the sensors and with the processor configured to operate and control the device.
 27. A device for electrolyzing water, the device comprising: a reservoir housing enclosing a collapsible reservoir, the collapsible reservoir for storing water, the reservoir housing having a passage through a first portion of the reservoir housing; an ion exchange structure in fluid communication with the collapsible reservoir via the passage, the ion exchange structure for electrolyzing water received from the collapsible reservoir, and with the ion exchange structure comprising: a first stack substrate comprising: a first silicon substrate comprising at least two ion exchange structures formed as an integral part of the first silicon substrate in a chamber formed in the first silicon substrate, and gas channels formed in the first silicon substrate; and a second silicon substrate comprising gas channels, the second silicon substrate having a first surface anodically bonded to the first silicon substrate, and the gas channels in the second silicon substrate being in fluid communication with the gas channels of the first silicon substrate; a case that encloses the reservoir housing and the ion exchange structure, the case having a gas release port and a gas return port, and with the case providing a high pressure chamber that is in fluid communication with the collapsible reservoir, via at least one second, different passage through a second, different portion of the reservoir housing.
 28. The device of claim 27, further comprising a second stack substrate being the same as the first stack substrate, the second stack substrate and the first stack substrate being bonded.
 29. The device of claim 28, further comprising a top stack substrate and a bottom stack substrate, the top stack substrate bonded to the either the first or second stack with the top stack substrate bonded to the other one of the top and bottom stack substrates.
 30. A device for use in electrolyzing water, the device comprising: a reservoir housing that encloses a collapsible reservoir, the collapsible reservoir for storing water, the reservoir housing having a passage through a first portion of the reservoir housing; an ion exchange structure in fluid communication with the collapsible reservoir via the passage, the ion exchange structure for electrolyzing water from the collapsible reservoir, and with the ion exchange structure comprising: a stack comprising a first silicon substrate comprising at least two ion exchange structures formed as an integral part of the first silicon substrate in a chamber formed in the first silicon substrate, and gas channels formed in the first silicon substrate; a second silicon substrate comprising gas channels, the second silicon substrate having a first surface anodically bonded to the first silicon substrate, the gas channels in the second silicon substrate being in fluid communication with the gas channels of the first silicon substrate; a third silicon substrate comprising at least two ion exchange structures formed as an integral part of the third silicon substrate in a chamber formed in the third silicon substrate, and gas channels formed in the third silicon substrate, with the second silicon substrate further having a second surface anodically bonded to the third silicon substrate; a fourth silicon substrate comprising gas channels, the fourth silicon substrate; having a first surface anodically bonded to the third silicon substrate, the gas channels in the fourth silicon substrate being in fluid communication with the gas channels of the third silicon substrate; and a case that encloses the reservoir housing and the ion exchange structure, and with the case providing a high pressure chamber that is in fluid communication with the collapsible reservoir via at least one second, different passage through a second, different portion of the reservoir housing.
 31. The device of claim 30, further comprising a top stack substrate and a bottom stack substrate, the top stack substrate bonded to the either the first or second stack with the top stack substrate bonded to the other one of the top and bottom stack substrates.
 32. The device of claim 21 further comprising: a storage tank in fluid communication with the gas release port.
 33. The device of claim 27 further comprising: a storage tank in fluid communication with the gas release port. 